Semiconductor device

A semiconductor device, comprising:

• a first gate structure extending along a first direction on a substrate;
• a first drain region extending along the first direction on one side of the first gate structure;
• a first source region and a second source region adjacent to another side of the first gate structure;
• a second gate structure on the substrate and extending along the first direction, wherein the first source region and the second source region are between the first gate structure and the second gate structure, and an edge of the first source region and an edge of the second source region between the first gate structure and the second gate structure are bordered and directly contacted by a shallow trench isolation under a top view;
• a first body contact region disposed between the first source region and the second source region;
• and
• a first body implant region extending along the first direction and overlapping part of the first gate structure, wherein a long side of the first body implant region is less than a long side of the first gate structure, wherein bottom surfaces of the first drain region, the first source region, the second source region, the first body contact region and the first body implant region are coplanar, a concentration of the first body contact region is greater than a concentration of the first body implant region, and an edge of the first body contact region is aligned with an edge of the first body implant region under the first gate structure.