Active matrix substrate, X-ray imaging panel with the same, and method for producing the same

A method for producing an active matrix substrate, the method comprising:

• forming a photoelectric conversion element on a substrate;
• forming an electrode on one surface of the photoelectric conversion element;
• forming an organic insulating film that covers the photoelectric conversion element and the electrode and forming an opening of the organic insulating film at a position where the opening overlaps the electrode when viewed in plan view;
• forming, after the opening of the organic insulating film has been formed, an opening of the electrode at a position where the opening of the electrode overlaps the opening of the organic insulating film when viewed in plan view;
• and
• forming a conductive film inside the opening of the electrode and the opening of the organic insulating film so as to be in contact with the electrode.