Back to results
US 11,114,485 B2Granted
Metal mirror based multispectral filter array
AssigneeViavi Solutions Inc.
InventorGeorg J. Ockenfuss
Life of this patent
Estimating the term…
Abstract
A device may include a multispectral filter array disposed on the substrate. The multi spectral filter array may include a first metal mirror disposed on the substrate. The multi spectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
Claims20
A method comprising:
- providing a substrate that includes a set of sensor elements;
- depositing multiple layers of a multispectral filter array onto the substrate,
- wherein the multiple layers include:
- a first spacer layer disposed over all sensor elements in the set of sensor elements,
- a second spacer layer disposed over less than all sensor elements in the set of sensor elements, and
- a metal mirror,
- depositing one or more other layers associated with the multispectral filter array onto the multiple layers;
- and
- attaching a lens that alters a characteristic of light that is directed toward a corresponding sensor element of the sensor elements.
6 more elements
A method comprising:
- depositing a first mirror structure onto a substrate associated with a set of optical sensors,
- wherein the first mirror structure includes a metal mirror;
- depositing a first spacer layer onto the first mirror structure,
- wherein the first spacer layer covers the set of optical sensors;
- depositing a second spacer layer that covers less than all of the set of optical sensors;
- and
- depositing a second mirror structure onto one or more portions of one or more of the first spacer layer or the second spacer layer.
4 more elements
A method comprising:
- providing a set of optical sensors;
- depositing a mirror structure over the set of optical sensors,
- wherein the mirror structure includes a metal mirror;
- and
- depositing a plurality of spacer layers over the mirror structure,
- wherein the plurality of spacer layers comprise:
- a first spacer layer that covers the set of optical sensors, and
- a second spacer layer that covers less than all sensors of the set of optical sensors.
5 more elements
Dependencies are inferred from the claim text.