Photoelectric conversion apparatus, photoelectric conversion system, moving body, and manufacturing method for photoelectric conversion apparatus

A photoelectric conversion apparatus comprising:

• a semiconductor substrate having a first surface on which light is incident and a second surface facing the first surface, and having one or a plurality of photoelectric conversion units performing photoelectric conversion on the incident light and accumulating first electric charges of a first polarity, one or a plurality of first transistors having a first gate formed on the second surface, and one or a plurality of second transistors having a second gate formed on the second surface, the second gate having a gate length shorter than a gate length of the first gate;
• a first fixed charge film continuously provided on the first surface directly or with an insulating film in between in an area overlapping the one or a plurality of photoelectric conversion units, the one or a plurality of first transistors, and the one or a plurality of second transistors in a plan view viewed from a direction perpendicular to the first surface of the semiconductor substrate, the first fixed charge film having fixed charges of the first polarity;
• and
• a second fixed charge film provided on a side of the first fixed charge film opposite to a side of the semiconductor substrate provided directly or with an insulating film in between in an area overlapping the one or a plurality of second transistors and the first fixed charge film in the plan view, the second fixed charge film having fixed charges of a second polarity,
• wherein, at a position overlapping with the one or the plurality of photoelectric conversion portions in the plan view, the second fixed charge film is not provided or a thickness of the second fixed charge film is less than a thickness of the first fixed charge film.