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US 11,114,445 B2Granted
Semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsJay-Bok Choi, Hyeonok Jung, Jemin Park, Yongseok Ahn
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Abstract
A semiconductor device includes a substrate having an active pattern, a cell region on the substrate and having a cell circuit, and a core region on the substrate having a peripheral circuit. In plan view, the active pattern on the core region includes a plurality of corners. Each of the corners has a rounding index that is equal to or less than about 15 nm. The rounding index is a distance between a respective tip of each of the corners and a right-angled corner.
Claims20
A semiconductor device, comprising:
- a substrate comprising an active pattern;
- a cell region on the substrate, the cell region comprising a cell circuit;
- and
- a core region on the substrate, the core region comprising a peripheral circuit,
- wherein, in plan view, the active pattern on the core region comprises a plurality of corners,
- wherein each of the corners has a rounding index that is equal to or less than about 15 nm, wherein the rounding index indicates a distance between a respective tip of the each of the corners and a right-angled corner.
3 more elements
A semiconductor device, comprising:
- a substrate comprising a cell region and a core region;
- and
- active patterns on the cell region and on the core region,
- wherein
- the core region is divided into a plurality of regions,
- wherein, in plan view, ones of the active patterns on each of the plurality of regions respectively comprise a plurality of corners, and
- each of the corners has a rounding index that is equal to or less than about 15 nm, wherein the rounding index indicates a distance between a respective tip of the each of the corners and a right-angled corner.
4 more elements
A semiconductor device, comprising:
- a semiconductor substrate comprising a cell region on which a memory circuit is provided and a core region on which a peripheral circuit is provided;
- a plurality of cell active patterns on the cell region, the cell active patterns having a same shape and arranged spaced apart from one another;
- and
- a plurality of peripheral active patterns on the core region,
- wherein, in plan view, each of the peripheral active patterns has a plurality of corners,
- wherein each of the corners has a rounding index that is equal to or less than about 15 nm, wherein the rounding index indicates a distance between a respective tip of the each of the corners and a right-angled corner.
3 more elements
Dependencies are inferred from the claim text.