Electrostatic discharge protection device

An electrostatic discharge (ESD) protection device, comprising:

• a substrate including an input region;
• a plurality of fins on the substrate in the input region;
• an insulating layer on the substrate, the insulating layer covering a portion of a sidewall of a fin, a top surface of the insulating layer being lower than the top surfaces of the plurality of fins;
• a well region, doped with first-type ions, in the plurality of fins and in the substrate;
• an epitaxial layer on each fin in the input region;
• a drain region, doped with second-type ions, in a top portion of each fin and in the epitaxial layer;
• an extended drain region, doped with the second-type ions, in a bottom portion of each fin to connect to the drain region and in a portion of the substrate, in the input region;
• and
• a counter-doped region, doped with the first-type ions, in a portion of the substrate between two adjacent fins to insulate adjacent extended drain regions, wherein the counter-doped region is formed on the well region and in a surface portion of the substrate between two adjacent fins to insulate adjacent extended drain regions.