Methods for loading or unloading substrate with evaporator planet
AssigneeSemiconductor Components Industries, LLC
InventorsMichael J. Seddon, Heng Chen Lee
Life of this patent
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Abstract
Implementations of methods of loading an evaporator may include, using a robotic arm, removing a substrate from a cassette and centering the substrate on a substrate aligner. The method may include aligning the substrate using the substrate aligner. The substrate may also include removing the substrate from the substrate aligner using the robotic arm and loading the substrate into a first available pocket of a planet of an evaporator using the robotic arm. The method may also include rotating the planet to a second available pocket after detecting a presence of the substrate in the first available pocket.
Claims20
A method for loading a substrate into an evaporator, the method comprising:
- using a robotic arm, removing a substrate from a cassette and centering the substrate on a substrate aligner;
- aligning the substrate using the substrate aligner;
- removing the substrate from the substrate aligner using the robotic arm;
- loading the substrate into a first available pocket of a planet of an evaporator using the robotic arm;
- and
- rotating the planet to a second available pocket after detecting a presence of the substrate in the first available pocket.
A method for unloading a substrate from an evaporator dome, the method comprising:
- providing an evaporator planet comprising a plurality of pockets, each pocket comprising a substrate loaded thereon;
- removing one of the plurality of substrates from one of the pockets in the planet using a robotic arm;
- placing the substrate on a substrate aligner using the robotic arm and centering the substrate using the substrate aligner;
- removing the substrate from the substrate aligner using the robotic arm;
- and
- placing the substrate into a cassette using the robotic arm.
A method for loading and unloading a substrate into an evaporator, the method comprising:
- loading a substrate by:
- providing a substrate having a first side and a second side opposite the first side, wherein the first side of the substrate comprises an active area, the substrate comprised within a cassette;
- using a robotic arm, unloading the substrate from the cassette onto a substrate aligner;
- aligning the substrate using the substrate aligner;
- and
- using the robotic arm, loading the substrate into an available pocket in an evaporator planet,
- rotating the evaporator planet to another available pocket;
- and
- unloading the substrate by:
- rotating the evaporator planet to a pocket containing the substrate;
- unloading the substrate from the pocket using the robotic arm;
- loading the substrate into the substrate aligner using the robotic arm;
- aligning the substrate using the substrate aligner;
- unloading the substrate from the substrate aligner using the robotic arm;
- and
- loading the substrate into the cassette, using the robotic arm.
Dependencies are inferred from the claim text.