Method and device for radio frequency impedance matching, and semiconductor processing apparatus

A device for radio frequency (RF) impedance matching for a radio frequency including M pulse periods, each of the M pulse periods including N pulse phases, M and N being integers greater than 1, the device comprising one or more processors, individually or collectively, configured:

• using first n pulse phases of each of first m pulse periods as frequency scanning stages each corresponding to one of the first m pulse periods to perform frequency scanning matching, a start value of a frequency scanning parameter of the frequency scanning stage of an (i+1)-th pulse period being consistent with an end value of the frequency scanning parameter of the frequency scanning stage of an i-th pulse period to make an end value of the frequency scanning parameter of the frequency scanning stage of an m-th pulse period to match a target value of the frequency scanning parameter, m and n being integers greater than 0, m<M, n≤N, and i=1, 2, . . . , m;
• and
• maintaining the frequency scanning parameter of pulse phases, corresponding to the first n pulse phases, of each pulse period from an (m+1)-th pulse period to an M-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of each pulse period from the (m+1)-th pulse period to the M-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the m-th pulse period.

A semiconductor processing apparatus, comprising a device for radio frequency (RF) impedance matching for a radio frequency including M pulse periods, each of the M pulse periods including N pulse phases, M and N being integers greater than 1, the device comprising one or more processors, individually or collectively, configured for:

• using first n pulse phases of each of first m pulse periods as frequency scanning stages each corresponding to one of the first m pulse periods to perform frequency scanning matching, a start value of a frequency scanning parameter of the frequency scanning stage of an (i+1)-th pulse period being consistent with an end value of the frequency scanning parameter of the frequency scanning stage of an i-th pulse period to make an end value of the frequency scanning parameter of the frequency scanning stage of an m-th pulse period to match a target value of the frequency scanning parameter, m and n being integers greater than 0, m<M, n≤N, and i=1, 2, . . . , m;
• and
• maintaining the frequency scanning parameter of a pulse phase pulse phases, corresponding to the first n pulse phase, of each pulse period from an (m+1)-th pulse period to an M-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of each pulse period from the (m+1)-th pulse period to the M-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the m-th pulse period.