Thin-film capacitor
AssigneeTDK Corporation
InventorsKoichi Tsunoda, Mitsuhiro Tomikawa, Kazuhiro Yoshikawa, Kenichi Yoshida
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Abstract
In a thin-film capacitor, an electrode terminal layer and an electrode layer of a capacitor portion are connected to electrode terminals by via conductors that is formed to penetrate an insulating layer in a thickness direction thereof, and a short circuit wiring in the thickness direction is realized by the via conductors. In the thin-film capacitor, an increase in the number of terminals in the plurality of electrode terminals is achieved, a decrease in length of a circuit wiring is achieved, and thus a thin-film capacitor with low-ESL has been achieved.
Claims5
A thin-film capacitor comprising:
- a first electrode terminal disposed on one surface side of the thin-film capacitor and including a connection area configured for external electrical connection;
- a capacitor portion partially formed on a side of the first electrode terminal opposite to the one surface side and having a stacked structure in which an electrode layer and a dielectric layer are stacked in the stacked structure;
- an insulating layer covering a formation area and a non-formation area from the side of the first electrode terminal opposite to the one surface side, the capacitor portion being formed in the formation area, the capacitor portion not being formed in the non-formation area;
- a plurality of second electrode terminals provided on the insulating layer;
- and
- a plurality of via conductors formed to penetrate the insulating layer in a stacking direction of the capacitor portion and connecting each of the plurality of second electrode terminals to one of the first electrode terminal and the electrode layer of the capacitor portion,
- wherein a thickness of the first electrode terminal is larger than a thickness of the capacitor portion.
Dependencies are inferred from the claim text.