Probe card for high-frequency applications

A probe card comprising:

• a plurality of contact elements extending along a longitudinal axis between a first end portion and a second end portion;
• a plurality of contact tips, having a height less than 200 μm, the height being measured along the longitudinal axis;
• a testing head housing the plurality of contact elements;
• a support plate;
• a flexible membrane having a first face and a second face opposite to the first face, and including conductive tracks extending from the first portion of the flexible membrane at each contact tip towards the second portion of the flexible membrane;
• the first end portions of the plurality of contact elements abutting onto the support plate;
• the plurality of contact tips being arranged on the first face of the flexible membrane at a first portion thereof;
• the second end portions of the plurality of contact elements abutting onto the second face the flexible membrane;
• wherein the testing head is arranged between the support plate and the first portion of the flexible membrane, which is electrically connected to the support plate through a second portion thereof;
• wherein the number and distribution of the contact elements abutting onto the second face of the flexible membrane at the first portion are different to the number and distribution of the contact tips abutting onto the first face of the flexible membrane at the first portion;
• and
• wherein the testing head comprises at least one upper guide and at least one lower guide, each having guide holes within which respective contact elements are slidingly housed, the at least one upper guide and at least one lower guide having a cap therebetween.