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US 11,112,426 B2Granted
Method and device of using a scanning probe microscope
AssigneeEcole Polytechnique Federale De Lausanne (Epfl)
InventorsGeorg Ernest Fantner, Jonathan David Adams, Adrian Pascal Nievergelt
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Abstract
A scanning probe microscope for high-speed imaging and/or nanomechanical mapping including a scanning probe comprising a cantilever with a tip at the distal end, and means for modulating a tip-sample distance separating the tip from an intended sample to be viewed with the microscope, the means for modulating being adapted to provide a direct cantilever actuation.
Claims14
A method for characterising a surface of a sample using atomic force microscopy with a cantilever acting as both actuator and sensor, the method comprising the steps of:
- generating an oscillating motion between a tip of the cantilever of the atomic force microscope and the surface of the sample by deforming at least a part of the cantilever to bring the tip of the cantilever in contact with the surface of the sample for a tip-sample interaction;
- recording a deflection of the cantilever resulting from the tip-sample interaction as a first signal;
- extracting the tip-sample interaction as a second signal from the first signal by removing a background signal;
- determining a peak force from the extracted second signal;
- comparing the peak force to a predetermined setpoint force to determine an error signal;
- generating a control signal from the error signal;
- and
- actuating a z-actuator using the control signal to maintain the peak force at the predetermined setpoint force,
- wherein the cantilever includes an actuation coating and a detection coating, each of the coatings made of a different material, and each of the coatings is arranged at a different location on the cantilever.
6 more elements
Dependencies are inferred from the claim text.