Particle measuring method and detection liquid
AssigneesKioxia Corporation, Rion Co., Ltd.
InventorsHiroshi Tomita, Hidekazu Hayashi, Eishi Shiobara, Kaoru Kondo, Takuya Tabuchi, Kazuna Bando, Sota Kondo
Life of this patent
Estimating the term…
Loading patent…
AssigneesKioxia Corporation, Rion Co., Ltd.
InventorsHiroshi Tomita, Hidekazu Hayashi, Eishi Shiobara, Kaoru Kondo, Takuya Tabuchi, Kazuna Bando, Sota Kondo
Estimating the term…
According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.
A particle measuring method comprising:
Dependencies are inferred from the claim text.