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US 11,112,297 B2Granted
Resonator and resonator system including the same and method of manufacturing the resonator
AssigneeSamsung Electronics Co., Ltd.
InventorsYongseop Yoon, Sungchan Kang, Cheheung Kim, Choongho Rhee, Hyeokki Hong
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Abstract
Provided are resonators, a resonator system including the resonators, and a method of manufacturing the resonators. The resonator includes a vibration beam configured to vibrate in response to an external signal, a sensing unit configured to detect the movement of the vibration beam, and a lumped mass unit including a base unit that contacts the vibration beam and a wing unit arranged separately from the vibration beam on the base unit.
Claims16
A resonator comprising:
- a vibration beam configured to vibrate in response to an external signal, an edge of the vibration beam being fixed on a supporting member, the vibration beam extending in a first direction;
- a sensing unit arranged on the vibration beam to detect movement of the vibration beam;
- and
- a lumped mass unit having a double layer structure in which a base unit and a wing unit are stacked sequentially, the lumped mass unit being arranged on the vibration beam,
- wherein the base unit contacts the vibration beam and
- wherein the wing unit is arranged on the base unit, the wing unit being separated from the vibration beam.
3 more elements
A resonator system comprising:
- a first resonator comprising:
- a first vibration beam;
- a first sensing unit configured to detect movement of the first vibration beam;
- and
- a first lumped mass unit comprising a first base unit contacting the first vibration beam and a first wing unit arranged on the first base unit, the first wing unit being separated from the first vibration beam, and the first lumped mass unit having a double layer structure in which the first base unit and the first wing unit are stacked sequentially;
- a second resonator comprising:
- a second vibration beam;
- a second sensing unit configured to detect movement of the second vibration beam;
- and
- a second lumped mass unit comprising a second base unit contacting the second vibration beam and a second wing unit arranged on the second base unit, the second wing unit being separated from the second vibration beam, and the second lumped mass unit having a double layer structure in which the second base unit and the first wing unit are stacked sequentially;
- and
- a processor configured to process signals detected from the first and second resonators.
9 more elements
Dependencies are inferred from the claim text.