Film-forming apparatus and film-forming method

A magnetic film formation apparatus comprising:

• a target containing a magnetic material;
• a support that supports a substrate and locates the substrate in an arrangement region opposing the target;
• a first magnetic field formation unit located at a side of the arrangement region opposite to the target, wherein the first magnetic field formation unit forms a horizontal magnetic field parallel to an oscillation direction, which is one direction extending along the substrate, at a side of the arrangement region where the target is located, and the first magnetic field formation unit oscillates the horizontal magnetic field in the oscillation direction at least between one end of the arrangement region and another end of the arrangement region in the oscillation direction;
• and
• a second magnetic field formation unit located at a side of the target opposite to the support, wherein the second magnetic field formation unit oscillates in the oscillation direction between one end of the target and another end of the target in the oscillation direction and forms a magnetic field at a side of the target where the support is located,
• wherein the first magnetic field formation unit's horizontal magnetic field is formed by only a pair of permanent magnets wherein a magnetic pole at a distal end of one of the permanent magnets and a magnetic pole at a distal end of the other one of the permanent magnets are different magnetic poles, and
• wherein the first magnetic field formation unit has a first width in the oscillation direction, the second magnetic field formation unit has a second width in the oscillation direction, and the second width is equal to the first width.