Method for producing nanostructured layers
AssigneeForschungszentrum Juelich GmbH
InventorsAiko Buenting, Sven Uhlenbruck
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Abstract
According to a method for producing a nanostructured electrode for an electrochemical cell, in which active material is applied to an electrically conductive substrate, the active material is deposited on the electrically conductive substrate by magnetron sputtering in one process step, a ceramic target comprising an electrode material having an additional carbon proportion between 0.1 and 25% by weight is used, the substrate being kept at temperatures between 400° C. and 1200° C. during the deposition, in such a way that a fibrous porous network is formed.
Claims14
A method for producing a nanostructured electrode for an electrochemical cell, the method comprising:
- providing an electrically conductive substrate and a target, wherein the target comprises a ceramic electrode material and carbon, the carbon proportion of the target being between 0.1 and 25% by weight;
- heating the electrically conductive substrate to a temperature of between 400° C. and 1200° C.;
- and
- depositing, via a single magnetron sputtering process step, the ceramic electrode material onto the electrically conductive substrate so as to form a fibrous porous network of fibers having a diameter in a range of 10-200 nm,
- wherein the temperature of the substrate remains between 400° C. and 1200° C. during the depositing,
- wherein the magnetron sputtering process step is performed with a power density of 0.5 to 2 W/cm2, and
- wherein the magnetron sputtering process step provides a deposition rate of 0.1 to 1 mg·h/cm2.
Dependencies are inferred from the claim text.