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US 11,111,131 B2Granted
MEMS microphone, a manufacturing method thereof and an electronic apparatus
AssigneeGoertek Inc.
InventorQuanbo Zou
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Abstract
A MEMS microphone, a manufacturing method thereof and an electronic apparatus are disclosed. The MEMS microphone comprises: a MEMS microphone device including a MEMS microphone chip and a mesh membrane monolithically integrated with the MEMS microphone chip; and a housing including an acoustic port, wherein the MEMS microphone device is mounted in the housing, and the mesh membrane is arranged between the MEMS microphone chip and the acoustic port as a particle filter for the MEMS microphone chip.
Claims10
A method for manufacturing a MEMS microphone, including:
- preparing a MEMS microphone wafer, wherein the sacrificial layer between a diaphragm and a backplate of the MEMS microphone wafer are not released;
- preparing a mesh wafer, wherein a mesh membrane is formed on the mesh wafer;
- bonding the MEMS microphone wafer with the mesh wafer;
- forming a back hole for the mesh membrane in the mesh wafer;
- etching the sacrificial layer in the MEMS microphone wafer to release the diaphragm and the back plate;
- singulating the MEMS microphone wafer and the mesh wafer to form a MEMS microphone device including a MEMS microphone chip and a monolithically integrated mesh membrane;
- and
- mounting the MEMS microphone device in a housing, wherein the housing has an acoustic port, and the mesh membrane is arranged between the MEMS microphone chip and the acoustic port as a particle filter for the MEMS microphone chip.
5 more elements
Dependencies are inferred from the claim text.