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US 11,110,496 B2Granted
Nano composite structure with nano patterned structure on its surface and method of producing the same
AssigneeKorea Institute of Science and Technology
InventorsMyoung Woon Moon, Tae Jun Ko, Kyu Hwan Oh
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Abstract
Provided are a method of producing a nano composite structure and a nano composite structure produced by using the same. The method comprises producing a substrate; placing a metal net structure above the substrate; and plasma treating the substrate above which the metal net structure is placed. The nano composite structure includes a substrate having a plurality of first protrusions constituting a nano pattern on its surface; and an inorganic particle disposed on an end of at least a portion of the first protrusions.
Claims15
A method of producing a nano composite structure comprising:
- providing a substrate;
- placing a metal net structure above the substrate;
- and
- plasma treating the substrate above which the metal net structure is placed,
- wherein the plasma treating comprises
- depositing a metal or metal oxide particle disposed from the metal net structure on the surface of the substrate through the plasma treatment;
- and
- etching residual portions other than portions on which the metal net structure is placed in contact with the substrate, or the metal or metal oxide particles are deposited from the surface of the substrate through the plasma treatment.
5 more elements
Dependencies are inferred from the claim text.