Multilayer fluidic devices and methods for their fabrication

A method of making a flowcell, the method comprising:

• bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer, wherein the organic solid support includes a plurality of elongated cutouts;
• bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer, so as to form the flowcell;
• wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
• and wherein each of the first and second inorganic solid supports comprises a plurality of wells, and each well contains a gel material that comprises a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

A method of making a flowcell, the method comprising:

• bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
• after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a patterned organic solid support including a plurality of elongated cutouts in the organic solid support;
• and
• bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
• wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

A method of making a flowcell, the method comprising:

• bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer;
• after bonding the first surface of the organic solid support to the surface of the first inorganic solid support, patterning the organic solid support so as to form a plurality of elongated cutouts in the organic solid support;
• bonding a surface of a second inorganic solid support to a second surface of the patterned organic solid support via a second bonding layer, so as to form the flowcell;
• wherein the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
• and wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material comprising a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

A flowcell comprising:

• a first inorganic solid support;
• a second inorganic solid support;
• an organic solid support, wherein the organic solid support includes a plurality of elongated cutouts;
• a first bonding layer bonding a first surface of the organic solid support to a surface of the first inorganic solid support, wherein the first bonding layer comprises a first chemically reactive layer of a silane or phenyl azide;
• and
• a second bonding layer bonding a surface of the second inorganic solid support to a second surface of the organic solid support, wherein the second bonding layer comprises a second chemically reactive layer of the silane or phenyl azide;
• wherein the organic solid support includes a radiation-absorbing material;
• wherein the flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts.

A flowcell comprising:

• a first inorganic solid support;
• a second inorganic solid support;
• an organic solid support, wherein the organic solid support includes a plurality of elongated cutouts;
• a first bonding layer bonding a first surface of the organic solid support to a surface of the first inorganic solid support;
• and
• a second bonding layer bonding a surface of the second inorganic solid support to a second surface of the organic solid support;
• wherein the flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
• and wherein each of the inorganic solid supports comprises a plurality of wells, and each well contains a gel material comprising a poly(N-(5-azidoacetamidylpentyl)acrylamide-co-acrylamide (PAZAM) polymer.

A method of making a flowcell, the method comprising:

• bonding a first surface of an organic solid support to a surface of a first inorganic solid support via a first bonding layer formed of a radiation-absorbing material, wherein the organic solid support includes a plurality of elongated cutouts;
• and
• bonding a surface of a second inorganic solid support to a second surface of the organic solid support via a second bonding layer formed of the radiation-absorbing material, so as to form the flowcell;
• wherein:
• the formed flowcell comprises a plurality of channels defined by the surface of the first inorganic solid support, the surface of the second inorganic solid support, and walls of the elongated cutouts;
• prior to bonding the first surface of the organic solid support to the surface of the first inorganic solid support, the method further comprises:
• coating the surface of the first inorganic solid support with indium tin oxide;
• plasma treating the indium tin oxide to enrich it with hydroxyl groups;
• performing a vapor phase silanization with (3-aminopropyl)-trimethoxysilane to covalently link the hydroxyl groups to the (3-aminopropyl)-trimethoxysilane to form a silane layer;
• and
• baking to crosslink the silane layer;
• prior to bonding the surface of the second inorganic solid support to the second surface of the organic solid support, the method further comprises:
• coating the surface of the second inorganic solid support with indium tin oxide;
• plasma treating the indium tin oxide to enrich it with hydroxyl groups;
• performing a vapor phase silanization with (3-aminopropyl)-trimethoxysilane to covalently link the hydroxyl groups to the (3-aminopropyl)-trimethoxysilane to form a second silane layer;
• and
• baking to crosslink the second silane layer.