Micro-channel device and method for manufacturing micro-channel device

A method for manufacturing a micro-channel device, comprising:

• controlling an irradiation amount of an ultraviolet ray generated by an ozone less low pressure ultraviolet lamp, wherein the ozone less low pressure ultraviolet lamp is configured to emit the ultraviolet ray without generation of ozone;
• controlling an ozone concentration of an ozone atmosphere independent of the irradiation amount of the ultraviolet ray, wherein the ozone atmosphere is generated by an ozone generator;
• activating a joining surface of at least one of a first substrate or an elastic film by irradiation of the joining surface with the ultraviolet ray in the ozone atmosphere, wherein the irradiation is based on the irradiation amount of the ultraviolet ray and the ozone concentration;
• laminating the elastic film between the first substrate and a second substrate;
• and
• thermally fusing at least a part of the first substrate and a part of the second substrate to at least a part of the elastic film based on the activation.