Energy-sensitive composition, cured product, and pattern forming method
AssigneesTokyo Ohka Kogyo Co., Ltd., Tokyo University of Science Foundation
InventorsKunihiro Noda, Dai Shiota, Koji Arimitsu
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AssigneesTokyo Ohka Kogyo Co., Ltd., Tokyo University of Science Foundation
InventorsKunihiro Noda, Dai Shiota, Koji Arimitsu
Estimating the term…
An energy-sensitive composition including at least one of a silane compound monomer capable of forming a polysilane compound, a silane compound oligomer and the polysilane compound, and a base generator (B) represented by the following formula (1): in which R1 to R11 each independently represents a hydrogen atom, a halogen atom, a nitro group, an alkyl group, an aryl group, an arylalkyl group or an alkoxy group, R5 and R6 may be connected to each other via a single bond or a divalent linking group, Zq+ represents a q-valent counter cation composed of a base having a pKa of 24 or more, and q represents an integer of 1 or more.
An energy-sensitive composition comprising:
Dependencies are inferred from the claim text.