Laser processing apparatus

A laser processing apparatus comprising:

• a laser source which generates a laser beam;
• a scanner disposed in an optical path of the laser beam from the laser source, wherein the scanner adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction;
• and
• a reflector disposed in an optical path of the laser beam adjusted by the scanner, wherein the reflector reflects the laser beam adjusted by the scanner,
• wherein the reflector comprises:
• a first sub-reflector which shifts an optical path of the laser beam adjusted by the scanner in the first direction;
• and
• a second sub-reflector which shifts the optical path of the laser beam adjusted by the scanner in a third direction opposite to the first direction,
• wherein the apparatus further comprises:
• a stage, onto which the laser beam reflected by the reflector is incident, the stage including a surface facing the reflector;
• and
• an F-theta lens which adjusts a focal distance of the laser beam to be constant,
• wherein the F-theta lens is disposed between the reflector and the scanner in a direction perpendicular to the surface of the stage, and
• wherein the F-theta lens overlaps the first sub-reflector and the second sub-reflector in the direction perpendicular to the surface of the stage.