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US 11,079,544 B2Granted
Waveguide absorbers
AssigneeGlobalFoundries U.S. Inc.
InventorsYusheng Bian, Bo Peng, Michal Rakowski, Ajey Poovannummoottil Jacob
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to Waveguide absorbers and methods of manufacture are provided. The waveguide structure includes a photonics component and a spirally configured waveguide absorber coupled to a node of the photonics component which reduces optical return loss.
Claims20
A structure comprising:
- a photonics component;
- and
- a spirally configured waveguide absorber comprising an input end that is coupled to a node of the photonics component which reduces optical return loss,
- wherein the spirally configured waveguide absorber is composed of a combination of semiconductor materials, with at least one passivation layer contacting a first of the semiconductor materials and with another passivation layer encapsulates or seals the first of two semiconductor materials.
1 more element
A structure comprising:
- a semiconductor waveguide component;
- and
- a spirally configured waveguide absorber coupled to and integrated into a semiconductor monolithic structure with the semiconductor waveguide component, the spirally configured waveguide absorber comprising a combination of Ge material and Si material, with one or more passivation layers contacting the Ge material and a SiN layer contacting the one or more passivation layers, the one or more passivation layers and the SiN material encapsulating or sealing the Ge material.
A structure comprising:
- a semiconductor waveguide component;
- a rectangular or circular concentrically spiraled waveguide absorber composed of dielectric material or poly silicon;
- and
- a tapered coupler coupling the rectangular or circular concentrically spiraled waveguide absorber to the semiconductor waveguide component, the coupler including a first tapered portion of same material as the semiconductor waveguide component and a second tapered portion of a same material of the rectangular or circular concentrically spiraled waveguide absorber,
- wherein the first tapered portion and the second tapered portion comprise a same material with different etching depths.
2 more elements
Dependencies are inferred from the claim text.