Electromechanical component, electromechanical component arrangement, method of detecting a potential difference by using an electromechanical component, and method for performing a functional test on the electromechanical component

An electromechanical component for deflecting a particle beam, comprising:

• a first electrode;
• a second electrode;
• an elastically deformable proving structure;
• and
• a substrate;
• wherein the first electrode and the second electrode are located opposite one another at a distance;
• wherein the substrate comprises an opening in a region between the first electrode and the second electrode;
• wherein the first electrode and the second electrode are arranged to generate an electrical field in the event of there being a potential difference between the first electrode and the second electrode;
• and
• wherein the opening is configured to enable passage of the particle beam through the electromechanical component;
• wherein the first electrode and the second electrode are configured such that the electrical field is suited to influence the particle beam;
• wherein the elastically deformable proving structure is configured to be deflected in the event of there being a potential difference between the first electrode and the second electrode;
• wherein the opening is configured such that the particle beam passes through the opening along a first trajectory at a first operational potential difference, and
• wherein the electromechanical component is configured such that the particle beam extends along a second trajectory at a second operational potential difference.