Physical quantity sensor module, clinometer, and structure monitoring device

A physical quantity sensor module comprising:

• a resonant frequency shift based physical quantity sensor whose frequency adjusts with a change in physical quantity;
• a reference signal oscillator which outputs a reference signal;
• a frequency delta-sigma modulator which performs frequency delta-sigma modulation of the reference signal, using an operation signal based on a measurement target signal outputted from the resonant frequency shift based physical quantity sensor, and generates a frequency delta-sigma modulated signal;
• a first filter provided at an output of the frequency delta-sigma modulator and operating synchronously with the measurement target signal;
• a second filter provided on an output side of the first filter and operating synchronously with the reference signal;
• and
• a latch provided between the first filter and the second filter and operating synchronously with the reference signal, wherein
• the resonant frequency shift based physical quantity sensor has nonlinearity as a characteristic of an output signal in response to the change in the physical quantity.