MEMS pressure sensor with multiple sensitivity and small dimensions

A device, comprising:

• a semiconductor substrate;
• a MEMS pressure sensor on the substrate;
• a microprocessor on the substrate, the microprocessor being electrically coupled to the MEMS pressure sensor and configured to receive signals transmitted by the MEMS pressure sensor;
• a memory block coupled to the microprocessor;
• an input/output interface coupled to the microprocessor;
• and
• a speaker coupled to the microprocessor, the speaker being configured to generate and output an audible signal,
• wherein the MEMS pressure sensor includes:
• a body having a first face and a second face;
• a first cavity in the body, the first cavity having a first width;
• a first sensing region in the body between the first cavity and the first face, the first sensing region having a first depth;
• a second cavity in the body between the first cavity and the second face, the second cavity having a second width greater than the first width;
• a second sensing region in the body between the second cavity and the first face, the second sensing region having a second depth greater than the first depth;
• a first piezoresistive sensor in the first sensitive region;
• and
• a second piezoresistive sensor in the second sensitive region.