US 11,079,271 B2Granted

Position detection sensor that detects an incident position of light comprising plural pixel groups each with plural pixel parts

AssigneeHamamatsu Photonics K.K.

InventorsMunenori Takumi, Haruyoshi Toyoda, Yoshinori Matsui, Kazutaka Suzuki, Kazuhiro Nakamura, Keisuke Uchida

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Abstract

Provided is a position detection sensor. In a first pixel part, as an incident position is closer to a first end of a first pixel pair group in a second direction, an intensity of a first electric signal decreases. In a second pixel part, as the incident position is closer to the first end, an intensity of a second electric signal increases. In a third pixel part, as the incident position is closer to a second end of a second pixel pair group in a first direction, an intensity of a third electric signal decreases. In a fourth pixel part, as the incident position is closer to the second end, an intensity of a fourth electric signal increases. A calculation unit calculates a second position on the basis of the first and second electric signals, and calculates a first position on the basis of the third and fourth electric signals.

A position detection sensor that detects an incident position of light, comprising:

a first pixel pair group that includes a plurality of first pixel pairs arranged along a first direction, each of the first pixel pairs including a first pixel part that generates a first electric signal corresponding to an incident light amount of the light and a second pixel part that is disposed side by side with the first pixel part in the first direction and generates a second electric signal corresponding to an incident light amount of the light;
a second pixel pair group that includes a plurality of second pixel pairs arranged along a second direction, each of the second pixel pairs including a third pixel part that generates a third electric signal corresponding to an incident light amount of the light and a fourth pixel part that is disposed side by side with the third pixel part in the second direction intersecting the first direction and generates a fourth electric signal corresponding to an incident light amount of the light, and the second pixel pair group intersecting the first pixel pair group;
and
a calculation unit that calculates a first position that is the incident position in the first direction, and a second position that is the incident position in the second direction,
wherein in the first pixel part, as the incident position is closer to a first end of the first pixel pair group in the second direction, an intensity of the first electric signal decreases,
in the second pixel part, as the incident position is closer to the first end in the second direction, an intensity of the second electric signal increases,
in the third pixel part, as the incident position is closer to a second end of the second pixel pair group in the first direction, an intensity of the third electric signal decreases,
in the fourth pixel part, as the incident position is closer to the second end in the first direction, an intensity of the fourth electric signal increases, and
the calculation unit calculates the second position on the basis of an integrated value of the intensity of the first electric signal and an integrated value of the intensity of the second electric signal, and calculates the first position on the basis of an integrated value of the intensity of the third electric signal and an integrated value of the intensity of the fourth electric signal.

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Abstract

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