Physical quantity sensor, method of manufacturing physical quantity sensor, electronic apparatus, and vehicle

A method of manufacturing a physical quantity sensor having a base, a supporting member supported by the base, and a sensor element supported by the supporting member, the method comprising:

• preparing the base, the supporting member, and the sensor element;
• and
• joining the supporting member and the sensor element, wherein
• in the preparing,
• the sensor element includes
• a vibrator element having a pair of drive arms and a pair of detection arms,
• a drive signal wiring that is disposed on the vibrator element, that transmits a drive signal for vibrating a drive portion of the vibrator element, and that extends along a first axis, and
• a first detection signal terminal and a second detection signal terminal that are disposed on the pair of detection arms and that output detection signals in accordance with vibration of the pair of detection arms,
• the supporting member includes
• a substrate,
• a first detection signal wiring that is disposed on the substrate and that transmits the detection signal from the first detection signal terminal,
• a second detection signal wiring that is disposed on the substrate and that transmits the detection signal from the second detection signal terminal,
• a first portion in a frame shape joined to the base,
• the substrate to which the sensor element is joined and which is disposed inside the first portion, and
• a first beam portion swingably supporting the substrate around a third axis with respect to the first portion, and
• in the joining,
• the first detection signal wiring and the second detection signal wiring respectively include areas that extend along a second axis intersecting with the first axis and that intersect with the drive signal wiring in a plan view as seen in a direction in which the sensor element and the substrate overlap with each other.