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US 11,078,916 B2Granted
Vacuum pump
AssigneePfeiffer Vacuum GmbH
InventorsJan Hofmann, Florian Schneider
Life of this patent
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Abstract
The present invention relates to a vacuum pump, in particular to a turbomolecular pump, having at least one pump stage and having a pressure determination unit for determining a pressure present at a suction side of the vacuum pump, said pump comprising a measurement device, with a measurement tap of the measurement device being provided in the region of the pump stage or downstream of the pump stage.
Claims13
A vacuum pump having:
- at least one pump stage, and
- a pressure determination unit configured to determine a pressure present at a suction side of the vacuum pump and the pressure determination unit comprising a measurement device,
- a measurement tap of the measurement device provided in a region of at least one of the at least one pump stage and downstream of the at least one pump stage;
- wherein the pressure determination unit is configured to receive input signals corresponding to pressure measurements taken at the measurement tap, the pressure determination unit determining the pressure present at the suction side of the vacuum pump based on a product of the pressure measurement taken at the measurement tap and a correction factor, the correction factor being a quotient of internal suction capacity of the vacuum pump at the measurement tap to suction capacity of the vacuum pump at the suction side of the vacuum pump;
- and
- at least one means with which at least one operating parameter of the vacuum pump is determined and transmitted and/or input into the pressure determination unit, and wherein the pressure determination unit is configured such that the correction factor is modified on a basis of the determined at least one operating parameter or an input operating parameter.
3 more elements
Dependencies are inferred from the claim text.