Single crystalline metal foil and manufacturing method therefor
AssigneesInstitute for Basic Science, Unist (Ulsan National Institute of Science and Technology)
InventorsRodney S. Ruoff, Sunghwan Jin
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Abstract
The present invention relates to a manufacturing method for single crystalline metal foil including: thermally treating poly-crystalline metal foil positioned to be spaced apart from a base to manufacture single crystalline metal foil, and a single crystalline metal foil manufactured thereby. According to the present invention, single crystalline metal foil having a large area may be obtained by thermally treating the poly-crystalline metal foil under a condition at which stress applied to the poly-crystalline metal foil is minimized.
Claims7
A manufacturing method for single crystalline metal foil, the method comprising:
- thermally treating a poly-crystalline metal foil in a chamber to manufacture the single crystalline metal foil,
- wherein the poly-crystalline metal foil has a thickness ranging from 5 μm to 200 μm,
- wherein the chamber comprises a holder, and the poly-crystalline metal foil is suspended in the chamber from the holder via a fixation part of the poly-crystalline metal foil such that the poly-crystalline metal foil is spaced apart from a bottom surface and an inner surface of the chamber, and
- wherein a non-fixation part of the poly-crystalline metal foil is freely suspended to minimize a stress applied to the poly-crystalline metal foil.
Dependencies are inferred from the claim text.