Deposition apparatus including a heat dissipation member

A deposition apparatus, comprising:

• a chamber;
• a deposition source including a deposition material;
• a stage disposed in the chamber, wherein a target object is disposed on the stage and includes a deposition region;
• a first plate facing the stage and coupled to the chamber to define a space;
• a second plate disposed between the first plate and the stage;
• a heat dissipation member connected to the first plate and the second plate, wherein the heat dissipation member comprises a plurality of sidewall portions that form a frame shape enclosing outer side surfaces of the first plate and the second plate;
• and
• a plurality of spacers disposed between the first plate and the second plate, wherein each of the plurality of spacers is coupled to a sidewall portion of the plurality of sidewall portions and, and each of the plurality of spacers has a rod shape extending along the plurality of sidewall portions,
• wherein the second plate comprises:
• a diffusion part overlapping the deposition region, wherein a plurality of diffusion holes are provided in the diffusion part;
• and
• a peripheral part at least partially surrounding the diffusion part,
• wherein the plurality of spacers are spaced apart from each other on the peripheral part and are in direct contact with the first plate and the second plate.

A deposition apparatus, comprising:

• a chamber;
• a deposition source including a deposition material;
• a stage disposed in the chamber, wherein a target object is mounted on the stage and includes a deposition region;
• a first plate overlapping the stage and coupled to the chamber to define a space;
• a second plate disposed between the first plate and the stage, wherein the second plate comprises a first side extending in a first direction and a plurality of diffusion holes overlapping the deposition region;
• a heat dissipation member connected to the first plate and the second plate, wherein the heat dissipation member includes a first sidewall portion extending in the first direction;
• and
• a first spacer coupled to the first sidewall portion of the heat dissipation member and disposed between the first plate and the second plate, wherein the first spacer has a rectangular shape extending in the first direction,
• wherein a length of the first spacer in the first direction is shorter than a length of the first side in the first direction.