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US 11,078,120 B2Granted
Oxide sintered body, sputtering target and oxide semiconductor film
AssigneeIdemitsu Kosan Co., Ltd.
InventorsKazuyoshi Inoue, Futoshi Utsuno, Shigekazu Tomai, Masatoshi Shibata, Mami Itose
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Abstract
An oxide sintered body is characterized in that it comprises an oxide including an In element, a Zn element, a Sn element and a Y element and that a sintered body density is equal to or more than 100.00% of a theoretical density.
Claims15
An oxide sintered body comprising an oxide including an In element, a Zn element, a Sn element and a Y element, wherein
- the oxide sintered body density is equal to or more than 100.01% of a theoretical density,
- the oxide sintered body is mainly composed of the bixbyite phase represented by In2O3
- and atomic ratios of the Zn element, the Y element, the Sn element and the In element are within the following ranges:
- 0.01≤Zn/(In+Zn+Y+Sn)≤0.25,
- 0.03≤Y/(In+Zn+Y+Sn)≤0.25,
- 0.03≤Sn/(In+Zn+Y+Sn)≤0.30, and
- 0.20≤In/(In+Zn+Y+Sn)≤0.93.
4 more elements
An oxide sintered body comprising an In element, a Zn element, a Sn element and a Y element, wherein
- atomic ratios of the Zn element and the In element are within ranges below,
- the sintered oxide body includes no spinel phase represented by Zn2SnO4, and
- the oxide sintered body is mainly composed of the bixbyite phase represented by In2O3:
- 0.01≤Zn/(In+Zn+Y+Sn)≤0.25
- 0.50≤In/(In+Zn+Y+Sn)
- wherein atomic ratios of the Y element and the Sn element are within the following ranges:
- 0.03≤Y/(In+Zn+Y+Sn)≤0.25, and
- 0.03≤Sn/(In+Zn+Y+Sn)≤0.30.
5 more elements
An oxide sintered body comprising an In element, a Zn element, a Sn element and a Y element, wherein
- atomic ratios of the Zn element and the In element are within ranges below, wherein
- the oxide sintered body consists of a bixbyite phase represented by In2O3 and a pyrochlore phase represented by Y2Sn2O7, or
- the oxide sintered body consists of a bixbyite phase represented by In2O3, a pyrochlore phase represented by Y2Sn2O7 and an indium trizincoindate phase represented by In((Zn3In)O6)
- 0.01≤Zn/(In+Zn+Y+Sn)≤0.25
- 0.50≤In/(In+Zn+Y+Sn).
2 more elements
Dependencies are inferred from the claim text.