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US 11,078,082 B2Granted
Method of fabricating graphene structure having nanobubbles
AssigneeSamsung Electronics Co., Ltd.
InventorsJiyeon Ku, Wonhee Ko, Hyowon Kim
Life of this patent
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Abstract
Example embodiments relate to a method of manufacturing graphene structures having nanobubbles. The graphene structure includes a graphene layer on a substrate, the graphene layer having a plurality of convex portions and a band gap that is due to the plurality of convex portions. The method includes preparing the graphene layer on the substrate, and forming the plurality of convex portions on the graphene layer by irradiating a noble gas onto the graphene layer.
Claims8
A method of manufacturing a graphene structure, the method comprising:
- preparing a graphene layer on a substrate;
- and
- penetrating noble gas ions through the graphene layer such that the noble gas ions remain between the graphene layer and the substrate forming at least one nanobubble.
Dependencies are inferred from the claim text.