Manufacturing system and method of granting authority
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorHideki Sumi
Life of this patent
Estimating the term…
Abstract
A manufacturing system includes a plurality of manufacturing facilities, a remote terminal, and a remote authority controller that controls authority of a remote operation from the remote terminal. When an error is detected in a first manufacturing facility out of the plurality of manufacturing facilities, the remote authority controller grants authority of a remote operation of a second manufacturing facility to the remote terminal. The second manufacturing facility causes the error and is other than the first manufacturing facility.
Claims14
A manufacturing system comprising:
- a plurality of manufacturing facilities for performing a series of processes on a substrate;
- an inspection facility configured to detect at least one error on the substrate, the at least one error caused by the inspection facility or one of the plurality of manufacturing facilities;
- a remote terminal;
- and
- a main processor configured to:
- determine whether the at least one error was caused by the inspection facility or one of the plurality of manufacturing facilities;
- when the at least one error was caused by the inspection facility, allow the remote terminal to perform a remote control operation with the inspection facility;
- and
- when the at least one error was caused by one of the plurality of manufacturing facilities:
- provide a list of the at least one error detected by the inspection facility, each error caused from one of the plurality of manufacturing facilities;
- receive a selection on one of the list of at least one error;
- and
- determine a manufacturing facility that caused the selected error, among the plurality of manufacturing facilities,
- wherein the remote terminal is configured to initiate a remote control operation with the manufacturing facility that caused the selected error.
A method for operating a manufacturing system including a plurality of manufacturing facilities for performing a series of processes on a substrate, an inspection facility, and a remote terminal, the method comprising:
- detecting at least one error on the substrate, each error caused from the inspection facility or one of the plurality of manufacturing facilities;
- determining whether the at least one error was caused by the inspection facility or one of the plurality of manufacturing facilities;
- when the at least one error was caused by the inspection facility, allowing the remote terminal to perform a remote control operation with the inspection facility;
- and
- when the at least one error was caused by one of the plurality of manufacturing facilities:
- providing a list of the at least one error detected by the inspection facility;
- receiving a selection on one of the list of at least one error;
- determining a manufacturing facility that caused the selected error, among the plurality of manufacturing facilities;
- and
- initiating, by the remote terminal, a remote control operation with the manufacturing facility that caused the selected error.
Dependencies are inferred from the claim text.