Chemical replacement system

A photoresist (PR) replacement system, comprising:

• an automated vehicle configured to hold and transport a PR bottle;
• a computer system configured to:
• receive a request signal to replace the PR bottle;
• and
• transmit a command based on the request signal;
• and
• a transfer module comprising a holder and a transfer unit, wherein the holder comprises a placement sensor structure configured to optically determine a placement of the PR bottle in the holder, and wherein the transfer module is configured to:
• hold the PR bottle in the holder;
• and
• eject the holder using the transfer unit.

A method for replacing a photoresist (PR) bottle using a chemical replacement system, comprising:

• receiving a request signal for replacing the PR bottle in a holder;
• transmitting, via a communication network, a command to a transfer module;
• scanning and detecting objects surrounding a door unit associated with the holder to avoid collision;
• ejecting, with the transfer module, the holder;
• and
• replacing the PR bottle in the holder with another PR bottle transported by an automated vehicle.