Positive tone photopatternable silicone
AssigneeDow Silicones Corporation
InventorsLizhi Liu, Peng-Fei Fu
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Abstract
A method for producing a patterned silicone layer; said method comprising steps of: (a) depositing on a substrate a composition comprising: (i) a polysiloxane comprising alkenyl groups, (ii) a silane crosslinker comprising silicon-hydrogen bonds, (iii) a hydrosilylation catalyst, and (iv) a photolatent amine generator, to form an uncured resin; (b) exposing the uncured resin to ultraviolet light or electron beam irradiation through a mask to produce a patterned resin; (c) heating the patterned resin; and (e) removing at least a part of the uncured portion of the patterned resin to produce a final patterned silicone layer.
Claims7
A method for producing a patterned silicone layer;
- said method comprising steps of:
- (a) depositing on a substrate a composition comprising:
- (i) a polysiloxane comprising alkenyl groups, (ii) a silane crosslinker comprising silicon-hydrogen bonds, (iii) a hydrosilylation catalyst, and (iv) a photolatent amine generator, to form an uncured resin;
- (b) exposing the uncured resin to ultraviolet light or electron beam irradiation through a mask to produce a patterned resin;
- (c) heating the patterned resin;
- and (d) removing at least a part of the uncured portion of the patterned resin to produce a final patterned silicone layer.
A composition comprising (i) a polysiloxane comprising alkenyl groups, (ii) a silane crosslinker comprising silicon-hydrogen bonds, (iii) a hydrosilylation catalyst, and (iv) a photolatent amine generator;
- wherein the composition comprises no more than 0.1 wt % siloxane units having epoxy groups based on weight of composition solids;
- wherein the polysiloxane comprising alkenyl groups comprises from 0.5 to 20 wt % alkenyl groups;
- and wherein the polysiloxane comprising alkenyl groups is (A) an alkenyl-terminated polysiloxane that comprises units of R1R2SiO2/2 and alkenyl end groups, wherein R1 and R2 independently represent C1-C20 substituted or unsubstituted hydrocarbyl groups, (B) a vinyl-substituted MQ resin;
- or (C) a combination thereof;
- and wherein the silane crosslinker is a compound having at least three silicon-hydrogen bonds or a polymer having from 0.01 to 2.0 wt % SiH.
Dependencies are inferred from the claim text.