Photosensitive polyimide composition and photoresist film made thereof
AssigneeeChem Solutions Corp.
InventorsTz Jin Yang, Ming Che Chung
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AssigneeeChem Solutions Corp.
InventorsTz Jin Yang, Ming Che Chung
Estimating the term…
The present invention provides a photosensitive polyimide composition comprising a polyimide resin having a structural unit represented by the formula (1) and a structural unit represented by the formula (2), a quinonediazide sulfonate, a thermal curing agent, and a thermal acid generator. In the formulas (1) and (2), n is an integer of 10 to 600, Ar1 is a tetravalent organic group; Ar2 is a divalent to tetravalent organic group; Ar3 is a divalent aromatic group; and R1 is an OH group or a COOH group. The present invention also provides a photoresist film made of the above-mentioned photosensitive polyimide composition.
A photosensitive polyimide composition comprising a polyimide resin having a structural unit represented by the formula (1) and a structural unit represented by the formula (2), an quinonediazide sulfonate, a thermal curing agent, and a thermal acid generator,
Dependencies are inferred from the claim text.