Film mask, method for manufacturing same, and method for forming pattern using film mask and pattern formed thereby

A film mask comprising:

• a transparent substrate that is a plastic film;
• a darkened light-shielding pattern layer;
• a metal layer provided between the transparent substrate and the darkened light-shielding pattern layer;
• an attachment layer comprising an acrylic material, an epoxy-based material, or a urethane-based material provided between the metal layer and the transparent substrate;
• and
• an embossed pattern layer provided on a surface of the transparent substrate bearing the metal layer and the darkened light-shielding pattern layer,
• wherein the metal layer comprises aluminum, and the darkened light-shielding pattern layer comprises aluminum oxynitride.