Low wavefront error piezoelectrically actuated optical element

An optical element comprising:

• a support structure having a sidewall,
• a bendable cover member attached to the sidewall, and
• a piezoelectric actuator configured to shape said bendable cover member into a predetermined shape, wherein the piezoelectric actuator comprises a piezoelectric material and electrode layers above and/or below the piezoelectric material,
• wherein the optical element further comprises:
• a. a bottom electrode,
• b. a piezoelectric material in the form of a piezoelectrically active layer, and
• c. a top electrode,
• wherein the position of the piezoelectric actuator, as observed in a direction being parallel with the optical axis, is given by positions, wherein there is an overlap between all of the bottom electrode, the piezoelectrically active layer and the top electrode,
• wherein said optical element comprises an optically active area with an optical axis, wherein
• the piezoelectric actuator forms a closed line, which completely encloses the optical axis, and an outer edge of the piezoelectric actuator as observed in a direction being parallel with the optical axis defines a first line, wherein the outer edge is a closed line corresponding to the edge of the piezoelectric actuator facing away from the optical axis, and
• an inner edge of the support structure at the interface between the support structure and the bendable cover member as observed in the direction being parallel with the optical axis defines a second line, and
• wherein the first line and the second line as observed in the direction being parallel with the optical axis
• cross each other in two or more positions, and/or
• are parallel and coincident in one or more positions.