Optical module, electronic device, and driving method
AssigneeSeiko Epson Corporation
InventorsTomonori Matsushita, Nozomu Hirokubo
Life of this patent
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Abstract
An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.
Claims4
A driving method of a wavelength variable interference filter, the wavelength variable interference filter including a pair of mirrors having a gap between the mirrors, the pair of the mirrors being configured to move with respect to each other to vary the gap;
- an actuator configured to move one of the pair of the mirrors to set the gap between the mirrors according to a voltage applied thereto, so that the wavelength variable interference filter transmits a first wavelength of light corresponding to the gap;
- and a pair of electrodes configured to detect a capacitance formed therebetween according to the gap between the pair of the mirrors, wherein the gap between the pair of mirror is (i) a first distance when no voltage is applied to the actuator, (ii) a second distance when a first voltage is applied to the actuator where the second distance is less than the first distance, and (iii) a third distance when a second voltage is applied to the actuator where the third distance is greater than the second distance and the second voltage is less than the first voltage, the driving method comprising:
- detecting, by using the pair of electrodes, the first distance when no voltage is applied to the actuator;
- receiving wavelength data that specifies a second wavelength of light;
- retrieving, from a memory, gap data that represents different distances of the gap at which the wavelength variable interference filter transmits the second wavelength of light, the different distances of the gap corresponding to respective different orders of light transmission of the wavelength variable interference filter;
- selecting a fourth distance from among the different distances of the gap, so that the selected fourth distance is equal to or less than the detected first distance and equal to or greater than the second distance;
- retrieving, from the memory, voltage data corresponding to the selected fourth distance;
- and
- applying, to the actuator, a third voltage based on the retrieved voltage data to set the gap of the pair of the mirrors to be the selected fourth distance, so that the wavelength variable interference filter transmits the second wavelength of light.
A non-transitory computer readable medium that stores instructions for driving a wavelength variable interference filter, the wavelength variable interference filter including a pair of mirrors having a gap between the mirrors, the pair of the mirrors being configured to move with respect to each other to vary the gap;
- an actuator configured to move one of the pair of the mirrors to set the gap between the mirrors according to a voltage applied thereto, so that the wavelength variable interference filter transmits a first wavelength of light corresponding to the gap;
- and a pair of electrodes configured to detect a capacitance formed therebetween according to the gap between the pair of the mirrors, wherein the gap between the pair of mirrors is (i) a first distance when no voltage is applied to the actuator, (ii) a second distance when a first voltage is applied to the actuator where the second distance is less than the first distance, and (iii) a third distance when a second voltage is applied to the actuator where the third distance is greater than the second distance and the second voltage is less than the first voltage, the instructions causing one or more processors to:
- detect, by using the pair of electrodes, the first distance when no voltage is applied to the actuator;
- receive wavelength data that specifies a second wavelength of light;
- retrieve, from a memory, gap data that represents different distances of the gap at which the wavelength variable interference filter transmits the second wavelength of light, the different distances of the gap corresponding to respective different orders of light transmission of the wavelength variable interference filter;
- select a fourth distance from among the different distances of the gap, so that the selected fourth distance is equal to or less than the detected first distance and equal to or greater than the second distance;
- retrieve, from the memory, voltage data corresponding to the selected fourth distance;
- and
- apply, to the actuator, a third voltage based on the retrieved voltage data to set the gap of the pair of the mirrors to be the selected fourth distance, so that the wavelength variable interference filter transmits the second wavelength of light.
Dependencies are inferred from the claim text.