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US 11,029,465 B1Granted
Micro-ring modulator
AssigneeGlobalFoundries U.S. Inc.
InventorsMichal Rakowski, Yusheng Bian, Ajey Poovannummoottil Jacob, Steven M. Shank
Life of this patent
Estimating the term…
Abstract
One illustrative device disclosed herein includes a micro-ring modulator that comprises an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring. The device also includes an upper bus waveguide that is positioned vertically above at least a portion of the doped waveguide ring and at least a portion of the outer ring.
Claims15
A device, comprising:
- a micro-ring modulator that comprises an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring;
- and
- an upper bus waveguide that is positioned vertically above at least a portion of the doped waveguide ring and at least a portion of the outer ring,
- a lower waveguide, said lower waveguide comprising a first segment and a second segment that are spaced apart from one another, wherein the upper bus waveguide is also positioned vertically above at least a portion of the first segment and above at least a portion of the second segment,
- wherein the device further comprises a first heater structure positioned within the inner ring and a second heater structure positioned around an entire outer circumference of the outer ring.
2 more elements
A device, comprising:
- a micro-ring modulator comprising an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring;
- a lower waveguide, the lower waveguide comprising a first segment and a second segment that are spaced apart from one another;
- and
- an upper bus waveguide comprising a first portion, a second portion, and a third portion located between the first portion and the second portion, wherein the first portion is positioned vertically above at least a portion of the first segment, the second portion is positioned vertically above at least a portion of the second segment and the third portion is positioned vertically above and vertically spaced apart from a portion of at least one of the inner ring, the doped waveguide ring and the outer ring of the micro-ring modulator,
- wherein the device further comprises a first heater structure positioned within the inner ring and a second heater structure positioned around an entire outer circumference of the outer ring.
2 more elements
Dependencies are inferred from the claim text.