Low force wafer test probe
AssigneeInternational Business Machines Corporation
InventorsDavid M. Audette, Dennis R. Conti, Marc D. Knox, Grant W. Wagner
Life of this patent
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AssigneeInternational Business Machines Corporation
InventorsDavid M. Audette, Dennis R. Conti, Marc D. Knox, Grant W. Wagner
Estimating the term…
A probe includes a pedestal and at least one feature extending from the pedestal to engage a surface of a corresponding contact at a position offset from a central longitudinal axis of the contact. The pedestal includes a cavity and the feature can include one or more blades that extend from a periphery of the cavity to a central longitudinal axis of the pedestal. The three blades are configured to engage the surface of the contact. The three blades can be positioned within the cavity to provide a 120-degree rotational symmetry about the central longitudinal axis of the pedestal.
A method for manufacturing a wafer test probe, the method comprising:
A method for conducting a low force wafer test, the method comprising:
Dependencies are inferred from the claim text.