Defect inspection device, defect inspection method, and program

A defect inspection method comprising:

• an image acquisition step of acquiring a received light image created on the basis of transmitted light from an inspection object which is obtained by irradiating the inspection object with radiation;
• an image processing step of extracting a defect candidate image that is an image corresponding to a defect candidate of the inspection object from the received light image through image processing;
• a storage step of storing at least one of a defect image corresponding to a defect of the inspection object extracted in the past or information indicating a feature of the defect image, and classification information including a classification result indicating a classification of the defect of the defect image in a storage unit;
• a defect candidate classification step of assigning a defect classification to the extracted defect candidate image on the basis of the classification information stored in the storage unit;
• a display step of displaying the received light image on a display unit;
• a manipulation step of receiving selection of a display or a non-display of an auxiliary indication indicating a position of the defect candidate image and the classification of the defect candidate image on the display unit based on a wall thickness of the inspection object where the defect candidate exists, a size of the defect candidate or the classification of the defect candidate, and outputting a command for the selected display or non-display of the auxiliary indication;
• and
• a display control step of performing a display or a non-display of the auxiliary indication on the display unit on the basis of the command output from the manipulation step.

A computer-readable non-transitory tangible recording medium which records a defect inspection program causing a computer to execute:

• an image acquisition step of acquiring a received light image created on the basis of transmitted light from an inspection object which is obtained by irradiating the inspection object with radiation;
• an image processing step of extracting a defect candidate image that is an image corresponding to a defect candidate of the inspection object from the received light image through image processing;
• a storage step of storing at least one of a defect image corresponding to a defect of the inspection object extracted in the past or information indicating a feature of the defect image, and classification information including a classification result indicating a classification of the defect of the defect image in a storage unit;
• a defect candidate classification step of assigning a defect classification to the extracted defect candidate image on the basis of the classification information stored in the storage unit;
• a display step of displaying the received light image on a display unit;
• a manipulation step of receiving selection of a display or a non-display of an auxiliary indication indicating a position of the defect candidate image and the classification of the defect candidate image on the display unit based on a wall thickness of the inspection object where the defect candidate exists, a size of the defect candidate or the classification of the defect candidate, and outputting a command for the selected display or non-display of the auxiliary indication;
• and
• a display control step of performing a display or a non-display of the auxiliary indication on the display unit on the basis of the command output from the manipulation step.