Computerized method for configuring an inspection system, computer program product and an inspection system

A computerized method for configuring an inspection system, the method comprises:

• acquiring, by the inspection system, a group of first images, each image of the group of first images capturing a same portion of an object segment;
• wherein different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations, the first group of polarization configurations including combinations of first illumination polarization states and first collection polarization states;
• determining a plurality of polarization parameters of each pixel in each image of the group of first images;
• calculating, based on the plurality of polarization parameters, a group of second images of the object segment, wherein the group of second images represent different polarization configurations that belong to a second group of polarization configurations, the second group of polarization configurations including combinations of second illumination polarization states and second collection polarization states, wherein at least some of the second group of polarization configurations are different from the first group of polarizations configurations, and at least some of the second illumination polarization states are different from the first illumination polarization states;
• wherein a number of different polarization configurations of the second group of polarization configurations is bigger than a number of different polarization configurations included in the first group of polarization configurations;
• computing a second image attribute for each second image of the group of second images thereby providing multiple second image attributes;
• selecting, out of the group of second images, a selected second image based on at least some of the multiple second image attributes;
• and
• configuring the inspection system according to a polarization configuration that is associated with the selected second image.

A non-transitory computer readable medium that stores instructions for:

• acquiring, by an inspection system, a group of first pupil images;
• wherein different first pupil images of the group of first pupil images are acquired while the inspection system is configured with different combinations of first illumination polarization states and first collection polarization states that belong to a first group of polarization configurations;
• determining a plurality of polarization parameters of each pixel in each image of the group of first pupil images;
• calculating, based on the plurality of polarization parameters, a group of second pupil images, wherein the group of second pupil images represent a second group of polarization configurations comprising combinations of second illumination polarization states and second collection polarization states, wherein at least some of the second illumination polarization states are different from the first illumination polarization states;
• wherein a number of different polarization configurations of the second group of polarization configurations is bigger than a number of different polarization configurations included in the first group of polarization configurations;
• computing a second pupil image attribute for each second pupil image of the group of second pupil images thereby providing multiple second pupil image attributes;
• selecting, out of the group of second pupil images, a selected second pupil image based on at least some of the multiple second pupil image attributes;
• and
• configuring the inspection system according to a polarization configuration that is associated with the selected second pupil image.