Single photon sensitive element based high throughput analytical system

A throughput-scalable photon sensing system, comprising:

• a plurality of semiconductor dies sharing a common semiconductor substrate and comprising one or more through-silicon vias;
• a plurality of photon detection sensors configured to perform a single molecule or cluster sequencing analysis of biological or chemical samples;
• a plurality of dicing streets separating the plurality of semiconductor dies from one another, wherein each dicing street of the plurality of dicing streets comprises an indented area between two immediately neighboring semiconductor dies, the indented area facilitating separation of the two immediately neighboring semiconductor dies;
• wherein two immediately neighboring photon detection sensors of the plurality of photon detection sensors are arranged on respective two semiconductor dies separated by a dicing street of the plurality of dicing streets,
• wherein each photon detection sensor of the plurality of photon detection sensors is arranged on a separate semiconductor die of the plurality of semiconductor dies, and
• wherein at least one photon detection sensor of the plurality of photon detection sensors comprises:
• a plurality of sub-diffraction limit (SDL) photosensitive elements, each SDL photosensitive element being sensitive to a single photoelectron, and wherein a single image pixel is generated based on one or more two-dimensional or three-dimensional arrays of outputs generated by SDL photosensitive elements.