Method and device for optical surface measurement by means of a chromatic confocal sensor

A method for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from at least one light source is directed to the surface of a sample to be measured via an optical system with defined chromatic aberration,

• wherein the light source is tuned in relation to the wavelength to be emitted and the light reflected back from the sample surface is directed to at least one photosensor, wherein the sensor signal is measured over time and, the time and intensity of a signal maximum are determined and evaluated, wherein the height Z of the surface is derived from the wavelength of the light source at the time of the signal maximum,
• whereby the time-varying signal of the photosensor is analyzed electronically by means of a detection system to determine the signal maximum, wherein the detection system has an extreme value memory which monitors the time-varying signal until an extreme of the signal has been reached in each case, a peak indicator signal being generated in each case when the extreme is reached, with the aid of which the time of the extreme is established and with the aid of which in turn the wavelength of the light source associated with the signal maximum is established.