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US 11,028,500 B2Granted
Ingot puller apparatus that include a doping conduit with a porous partition member for subliming solid dopant
AssigneeGlobalWafers Co., Ltd.
InventorsRoberto Scala, Stephan Haringer, Franco Battan
Life of this patent
Estimating the term…
Abstract
Ingot puller apparatus for preparing silicon ingots that include a dopant feed system are disclosed. The dopant feed system include a dopant conduit having a porous partition member disposed across the dopant conduit. Solid dopant falls onto the partition member where it sublimes. The sublimed dopant is carried by inert gas through the partition member to contact and dope the silicon melt.
Claims20
An ingot puller apparatus for producing a silicon ingot comprising:
- a crucible for holding a melt of silicon;
- a growth chamber for pulling a silicon ingot from the melt;
- and
- a dopant conduit for introducing dopant into the melt, the dopant conduit having a length and comprising:
- one or more sidewalls, the one or more sidewalls forming a conduit chamber through which dopant passes, the conduit chamber having a width;
- an inlet through which solid dopant is introduced into the dopant conduit;
- an outlet through which a gaseous dopant is discharged through the dopant conduit;
- and
- a partition member disposed between the inlet and the outlet and supporting solid dopant introduced through the inlet, the partition member extending across the width of the conduit chamber, the partition member being within the last 25% of the length of the dopant conduit.
6 more elements
Dependencies are inferred from the claim text.