Method for preventing vacuum pump pipeline from blockage, and chemical vapor deposition machine

A chemical vapor deposition machine, comprising a vacuum pump, a process chamber, and an exhaust gas treatment device, an air inlet pipe being connected with the vacuum pump and the process chamber therebetween, and an air exhaust pipe being connected with the exhaust gas treatment device and the vacuum pump therebetween, wherein, one end of the air exhaust pipe near the vacuum pump communicates with a gas tube which is configured to fill inert gas into the air exhaust pipe, the gas tube defines a first heating device, and the chemical vapor deposition machine is defined to prevent the vacuum pump pipe from blockage, comprising the following operations:

• opening a gas source, and introducing reaction gas into the process chamber from the gas source;
• carrying out a coating reaction of the chemical vapor deposition machine in the process chamber;
• after coating, closing the gas source, and introducing heated inert gas into the air exhaust pipe connected to an outlet of the vacuum pump;
• and turning on the vacuum pump, and introducing dust and exhaust gas in the process chamber into a exhaust gas treatment device through the air exhaust pipe.

A chemical vapor deposition machine, comprising a vacuum pump, a process chamber, and an exhaust gas treatment device, an air inlet pipe being connected with the vacuum pump and the process chamber therebetween, and an air exhaust pipe being connected with the exhaust gas treatment device and the vacuum pump therebetween, wherein, the chemical vapor deposition machine further comprises:

• a coating layer, defined on inner side walls of the air inlet pipe and the air exhaust pipe and configured to prevent dust adhesion;
• a gas tube, communicated with one end of the air exhaust pipe near the vacuum pump and configured to introduce inert gas into the air exhaust pipe;
• a first heating device, defined on the gas tube and configured to heat inert gas introduced into the gas tube;
• and a heat preservation device, defined on the air exhaust pipe and configured to perform heat preservation of an environment in the air exhaust pipe.