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US 11,028,108 B2Granted
Method for producing dialkylaminosilane
AssigneeJnc Corporation
InventorToru Tanaka
Life of this patent
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Abstract
A method for safely and efficiently producing high-purity dialkylaminosilane. Dialkylamine is fed simultaneously during feeding chlorosilane in the presence of metal to cause reaction. For example, chlorosilane and dialkylamine are fed, and then only dialkylamine is fed to cause reaction, whereby dialkylaminosilane is produced.
Claims5
A method for producing dialkylaminosilane, wherein dialkylamine is fed simultaneously during feeding chlorosilane in the presence of metal to cause reaction in a batch reactor wherein the metal to be added is magnesium.
Dependencies are inferred from the claim text.