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US 11,028,047 B2Granted
Method for recovering dimethyl sulfoxide from recovered resist remover
AssigneeKuraray Co., Ltd.
InventorsKunio Mayahara, Koji Tamura, Akinobu Takeda
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Abstract
A method for recovering dimethyl sulfoxide, including a step of contacting a recovered resist remover containing at least one compound selected from the group consisting of glycol ether, glycol and triol, and dimethyl sulfoxide with water and performing distillation.
Claims9
A method for recovering dimethyl sulfoxide from a composition, the method comprising:
- contacting the composition with water, where the composition comprises at least one compound selected from a group consisting of glycol ethers, glycols, and triols, and dimethyl sulfoxide;
- and performing distillation on the composition contacted with water to recover a purified dimethyl sulfoxide product,
- wherein an amount of the water contacted with the composition is from 0.1 to 100 parts by mass with respect to 1 part by mass of the composition.
Dependencies are inferred from the claim text.