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US 11,028,005 B2Granted
Glass for semiconductor processing
AssigneeAGC Inc.
InventorsSeiji Inaba, Kazutaka Ono
Life of this patent
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Abstract
To provide a glass plate having a high Young's modulus and a high devitrification viscosity. A glass includes, in mol % based on oxides: SiO2 of 30.0 to 50.0%; B2O3 of 10.0 to 30.0%; Al2O3 of 10.0 to 30.0%; Y2O3 of 3.0 to 17.0%; and Gd2O3 of 3.5 to 17.0%, in which (Gd2O3+Y2O3) is from 16.0 to 22.0%, and (Gd2O3/Y2O3) is from 0.15 to 7.0.
Claims7
A glass comprising, in mol % based on oxides:
- SiO2 of 30.0 to 50.0%;
- B2O3 of 10.0 to 30.0%;
- Al2O3 of 10.0 to 30.0%;
- Y2O3 of 3.0 to 17.0%;
- and
- Gd2O3 of 3.5 to 17.0%, wherein:
- (Gd2O3+Y2O3) is from 16.0 to 22.0%;
- (Gd2O3/Y2O3) is from 0.15 to 7.0;
- the glass has a modulus of equal to or larger than 110 GPa;
- and
- the glass has a devitrification viscosity log η of equal to or larger than 1.95.
8 more elements
Dependencies are inferred from the claim text.